Plasma immersion ion implantation (and deposition) inside metallic tubes of different dimensions and configurations

摘要

There is a strong need for developing methods to coat or implant ions inside metallic tubes for many practical contemporary applications, both for industry and science. Therefore, stainless steel tubes with practical diameters of 4,11 and 16 cm, but short lengths of 20 cm, were internally treated by nitrogen plasma immersion ion implantation (PHI). Different configurations as tube with lid in one of the ends or both sides open were tested for better PHI performance, in the case of smallest diameter tube. Among these PHI tests in tubes, using the 4 cm diameter one with a lid, it was possible to achieve tube temperatures of more than 700 ℃ in 15 min and maintain it during the whole treatment time (typically 2 h). Samples made of different materials were placed at the interior of the tube, as the monitors for posterior analysis, and the tube was solely pulsed by high voltage pulser producing high voltage glow discharge and hollow cathode discharge both driven by a moderate power source. In this experiment, samples of SS 304, pure Ti, Ti6A14V and Si were used for the tests of the above methods. Results on the analysis of the surface of these nitrogen PHI treated materials, as well as on their processing methods, are presented and discussed in the paper.