Tunable and bright EUV sources using the interaction of medium-energy electron beams with periodic multilayer targets

摘要

We give the design of tunable and bright EUV sources based on the interaction of medium-energy electrons with periodic multilayer targets. The basic phenomon is the Bragg resonant transition radiation occurring when transition radiation is diffracted under the Bragg conditions within a periodic multilayer structure. To achieve the tunability, we propose to use laterally d-graded multilayer, and to obtain bright sources, we propose to associate multilayer targets deposited on thin semitransparent membranes. The typical performances of such sources are calculated by using a recently developed model. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 21]