Outline of an ultracorrector compensating for all primary chromatic and geometrical aberrations of charged-particle lenses

摘要

A novel ultracorrector is outlined which compensates for the primary and secondary first-order chromatic aberrations and all third-order geometrical aberrations of electron optical systems with a straight axis. Owing to the imposed symmetry conditions on the fields and the paraxial fundamental rays, the corrector does not introduce aberrations with 2-fold symmetry. The chromatic aberrations are corrected by means of crossed electric magnetic quadrupoles while the third-order geometrical aberrations are eliminated by octopoles. By placing these elements at distinct positions within the corrector, it is possible to successively eliminate the third-order aberrations in such a way that each subsequent correction does not affect the aberrations corrected in the preceding correction steps.