Several years ago a revolutionary miniature TPC was developed using a pixel chip with a Micromegas foil spanned over it. To overcome the mechanical stability problems and improve the positioning accuracy while spanning a foil on top of a small readout chip a process has been developed in which a Micromegas-like grid is applied on a CMOS wafer in a post-processing step. This aluminum grid is supported on insulating pillars that are created by etching after the grid has been made. The energy resolution (measured on the absorption of the X-rays from a ~(55)Fe source was remarkably good. Several geometries have since been tested and we now believe that a Gas On Slimmed Silicon Pixel chip' (Gossip) may be realized. The drift region of such a gaseous pixel detector would be reduced to a millimeter. Such a detector is potentially very radiation hard (SLHC vertexing) but aging and sparking must be eliminated.
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机译：几年前，开发了一种革命性的微型TPC，它使用了像素芯片，其上覆盖有Micromegas箔。为了克服机械稳定性问题并提高定位精度，同时将箔片跨在小读出芯片的顶部，已经开发了一种工艺，其中在后处理步骤中将类似Micromegas的栅格施加在CMOS晶片上。铝制栅格支撑在绝缘柱上，该绝缘柱在制造栅格后通过蚀刻产生。能量分辨率（根据从〜（55）Fe光源吸收X射线测得的能量分辨率非常好。此后已经测试了几种几何形状，我们现在相信可以实现Gas On Slimmed Silicon Pixel芯片（八卦）这种气态像素检测器的漂移区域将减小到一毫米，这种检测器可能具有很高的抗辐射能力（SLHC顶点），但必须消除老化和火花。
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