An analysis of microchannel plate composition and its effect on extreme ultraviolet quantum efficiency

摘要

Modern microchannel plate detectors exhibit low quantum efficiency in the extreme ultra violet range compared to those manufactured before 1990. The cause of this reduction in efficiency is unknown. We describe recent investigations into the along-channel surface compositions of a number of microchannel plates (MCPs) of varying efficiency. These compositional profiles, generated using energy-dispersive X-ray spectroscopy, provide insight into possible mechanisms underlying the efficiency reduction and may assist in efforts to restore good extreme ultraviolet (EUV) performance to MCPs through modifications to the manufacturing process.