Nucleation and initial growth processes of diamond thin films for stripper foils

摘要

Carbon ion beam stripper foils were fabricated from diamond films synthesized on silicon via chemical vapor deposition. Fine-grained polycrystal diamond foils with decent surface flatness were obtained using a nucleation enhancement pretreatment process. Freestanding diamond foils were formed by etching a portion of the silicon substrate on which the diamond films well-adhered. In preliminary lifetime evaluations, the l-3μm-thick diamond foils lasted between 20 and 420min for 3.2MeV Ne~+ion-beam charge stripping.