Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

摘要

A new low-budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metfology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are also described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high-performance slope measuring instruments when measuring the same high-quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.