Campaign to identify the future CMS tracker baseline

摘要

CMS has started a campaign to identify the future sensor technology baseline for the Tracker Upgrade Phase II. A large variety of 6-in. wafers of different thicknesses and technologies have been ordered. The sensor properties and especially the behavior after irradiation will be investigated for floatzone, magnetic Czochralski and epitaxial silicon material with dedicated test structures. The sensors come in p-in-n and n-in-p versions. The p-stop as well as p-spray isolation technologies will be explored for the n-in-p type sensors. Some additional wafers will come with an additional routing in a second metal layer on selected structures. Approximately one half of these wafers have already been delivered. Pre-qualification has just started.