A magnetic electron energy analyser for fast data acquisition

摘要

A new approach to the acquisition of Auger electron spectra is introduced. Electrons emitted from a sample illuminated by a primary electron beam are dispersed by a magnetic field which immerses both sample and electron energy analyser. The analyser is broadly based on the 180° magnetic spectrometer, but can acquire spectra with good energy resolution for electrons with a significant component of velocity parallel to the magnetic field. An Active Pixel Sensor is used to acquire the electron spectrum without the use of a microchannel plate as in most currently used analysers. An example spectrum of an elastic peak is given.