Dynamic X-ray direct conversion detector using a CdTe polycrystalline layer coupled to a CMOS readout chip

摘要

A direct detection X-ray imager is presented. It uses polycrystalline cadmium telluride (CdTe) grown by close space sublimation technique for the X-ray photoconductor. A 15 mm×15 mm CdTe layer is connected to a 200× 200 pixel readout CMOS by indium bumping. X-ray performance at 16 frames/s rate is measured. In particular a readout noise of 0.5 X-ray, an MTF of 50% at 4 Ip/mm and a DQJE of 20% at 4 lp/mm are obtained.