Laser processing in 3D diamond detectors

摘要

A technique for electrode production within diamond using a femtosecond laser system is described. Diagnosis tests to quantify the stress, the diamond to graphite ratio, and the resistivity of these electrodes are discussed. A 3D electronic grade single crystal diamond detector produced using this technique is shown, and the electrodes have a resistivity of O( 1 Ω cm). An improvement to the technique through the use of an adaptive wavefront shows a reduction of the diamond to graphite ratio, and smaller, higher quality electrodes were manufactured.