Electron beams scanning: A novel method

摘要

In this research, a spatial electron beam scanning is reported. There are various methods for ion and electron beam scanning. The best known of these methods is the wire scanning wherein the parameters of beam are measured by one or more conductive wires. This article suggests a novel method for e-beam scanning without the previous errors of old wire scanning. In this method, the techniques of atomic physics are applied so that a knife edge has a scanner role and the wires have detector roles. It will determine the 2D e-beam profile readily when the positions of the scanner and detectors are specified.