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Fast timing monolithic silicon pixel sensor for TOF-PET

机译:用于TOF-PET的快速定时单片硅像素传感器

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摘要

The Thin-TOF PET (TT-PET) project aims at the construction of a small-animal PET scanner based on silicon monolithic pixel sensors with 30 ps time resolution for 511 keV photons, equivalent to 100 ps time resolution for minimum ionizing particles. The high time resolution of the pixel sensor allows for precise time of flight measurement of the two photons and a significant improvement in the signal-to-noise ratio of images. The TT-PET scanner also has sensitivity for photon depth of interaction, thus improving the spatial resolution across the whole view of the scanner. The performance of the scanner estimated by a GEANT4 Monte Carlo simulation is presented.In order to achieve the high time resolution, the SiGe heterojunction bipolar transistor technology (SG13S from IHP) was chosen for fast integration, low equivalent noise charge and low power consumption. TCAD simulations were used to design the appropriate guard rings for the pixel sensor. Laboratory measurements of the first test chip show the correct functionality of the guard ring up to a bias potential of 200V applied to the pixels and a good signal-to-noise ratio for the detection of electrons from a Sr-90 source. A test beam measurement with an un-thinned chip shows more than 99% efficiency and approximately 200 ps time resolution for minimum ionizing particles despite the absence of wafer thinning and post-processing.
机译:Thin-TOF PET(TT-PET)项目旨在基于硅整体式像素传感器构建小型动物PET扫描仪,其对511 keV光子的时间分辨率为30 ps,相当于最小电离粒子的时间分辨率为100 ps。像素传感器的高时间分辨率可实现两个光子的精确飞行时间测量,并显着改善图像的信噪比。 TT-PET扫描仪还对相互作用的光子深度具有敏感性,从而提高了扫描仪整个视图的空间分辨率。介绍了通过GEANT4蒙特卡罗模拟评估的扫描仪的性能。为了实现高时间分辨率,选择了SiGe异质结双极晶体管技术(IHP的SG13S)以实现快速集成,低等效噪声电荷和低功耗。 TCAD仿真被用来为像素传感器设计合适的保护环。第一个测试芯片的实验室测量结果表明,高达200V的偏置电位施加到像素上的保护环具有正确的功能,并且具有良好的信噪比,可检测来自Sr-90光源的电子。尽管没有晶圆变薄和后处理,但使用未稀释芯片的测试光束测量显示出超过99%的效率和大约200 ps的时间分辨率,可最小化电离颗粒。

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