Wacoh Corp. has developed a 5-axes motion sensor that can measure three axes of acceleration and two axes of angular rate with a single detection chip. This sensor was commercialized based on a basic patent right possessed by Wacoh for a micromachining technology established by the Yamagata Prefectural Industrial Technology Center and Wacoh. This is the first case of the development of a capacitive and vibration type silicon multi-axial motion sensor.
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