The Institute of Fluid Science, Tohoku University, jointly with Fuji Ceramics Co., Ltd., has established a new hybrid sintering process named Hybrid Sintering Process that combines the microwave sintering process and the hot press sintering process and which therefore enables the fabrication of high-performance piezoelectric actuators. The piezoelectric actuator has come to attract attention in recent years as a functional material, and research is being advanced intensively to develop high-performance actuators to promote the application of intelligent materials and structural systems for vibration control and for sound control. However, the sintering processes based on the use of conventional electric furnaces had been inconvenient in that they had only a small displacement volume.
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