An Analysis Area reduction Method for the Simulation of Dopant and Point-defect Pair Diffusion

摘要

This paper describes a new boundary Condition which facilitates the analysis area reduction in the simulation of dopant an point-defect pair diffusion. Effective effluent velocity of the point-defect at the bottom of the analysis region is approximately evaluated in terms of ratios of the fundamental solution of the point-defect diffusion equation and its spatial derivative. By means of this method, the analysis depth of the order of 10-100 μm which was necessary in the conventional simulation can be diminished to the order of 1μm.