Multi-element capacitive sensor for non-destructive measurement of the dielectric permittivity and thickness of dielectric plates and shells

摘要

Results of original research aimed at increasing the accuracy and applicability of capacitance testing techniques are presented. The essence of this innovation consists of the utilisation of multi-parameter capacitance testing based on scanning the test item by using an electric field of different topography. This approach enables to design a comparatively simple and reliable capacitance testing hardware and software for unilateral measurement of the thickness of dielectric plates, shells and layers with compensation of its dielectric properties. The design of the sensor consists of an array of coplanar electrodes adapted to the profile of the surface of the test piece with the possibility to change the potential distribution on the electrodes.