Optimization of spatial dependence of diffusion coefficient for acceleration of dopant diffusion

摘要

Purpose - It has been recently shown that diffusion of dopant during doping of inhomogeneous structure could be accelerated or decelerated in comparison with diffusion of dopant in structure with averaged diffusion coefficient. As a continuation of previous work, the purpose of this paper is to introduce an approach of estimating the limited value of acceleration of the dopant diffusion by choosing the dependence of the dopant diffusion coefficient on the coordinates. Design/methodology/approach - The authors analyzed relaxation of concentration of dopant during diffusion in inhomogeneous material. The authors determine conditions for maximal acceleration and deceleration of diffusion of dopant. The authors introduced analytical approach for analysis of dopant diffusion in inhomogeneous material. Findings - The authors determine conditions for maximal acceleration and deceleration of diffusion of dopant. Originality/value - It has been shown that dopant diffusion could be decelerated essentially to a greater extent, rather than accelerated.