Ring shape anchored RF MEMS contour mode disk resonator for UHF communication applications

摘要

A new high reliable microelectromechanical radial contour mode disk resonator is demonstrated with the ability to work at UHF range and high quality factor in both vacuum and air. This structure is capable to work at second radial mode without increasing the insertion loss and therefore lowering Q. These characteristics are achieved because of the ring shape anchor which is placed at the nodal ring of a hollow disk resonator at the equivalent second radial mode. Also the ring shape anchor seems to be more reliable than stem shape anchors reported in previous works. The motional resistance of the resonator is decreased due to displacement of electrodes, both inside and outside of the structure. In addition to providing simulation results, this paper formulates the resonance frequency and calculates the optimum location of the anchor. Transfer function, resonance frequency and anchor displacement versus inner radius are also studied.