Surface treatment on glass before thermal assisted direct bonding (TADB) is an issue for lab-on chip fabrication. Surface cleaning for obtaining good quality TADB on soda-lime glass are studied and tested in this paper. The optimized cleaning solution for soda lime glass samples is NH4OH–H2O2–H2O (0.5:1:5 volume ratio) and it can be considered as the optimised solution for cleaning soda-lime glasses by this solution, as a result of a trade-off between cleaning efficiency and surface etching. The surface quality before and after cleaning is evaluated by optical microscopy, profilometry and atomic force microscopy. TADB between the cleaned samples is carried out and the bonding strength measured. The tensile strength of optimized samples after TADB was found to be higher than 15 MPa.
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机译:热辅助直接键合(TADB)之前在玻璃上进行表面处理是实验室芯片制造的一个问题。本文对钠钙玻璃上的高质量TADB进行了表面清洗研究和测试。苏打石灰玻璃样品的最佳清洗溶液是NH 4 sub> OH–H 2 sub> O 2 sub> –H 2 sub> O (0.5:1:5的体积比),由于在清洁效率和表面蚀刻之间进行了权衡,因此可以认为它是用于清洁钠钙玻璃的最佳解决方案。清洁之前和之后的表面质量通过光学显微镜,轮廓仪和原子力显微镜进行评估。在清洁的样品之间进行TADB并测量粘合强度。发现优化的样品在TADB后的抗拉强度高于15 MPa。
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