The purpose of this paper is to propose two types of airflow velocity measurement modules, double-chip and single-chip, of MEMS-based flow sensors that consisting of heating resistors and sensing resistors on alumina substrates. In this study, MEMS techniques are used to deposit platinum films on the substrate to form resistors which are to regard as heaters and sensing elements. As air flows through the heater and the sensor, the temperature of the sensing resistor on the hot film decreases and the changes of the local temperature determine the airflow rate. The experimental results show the resistance linearly varies as airflow velocity changes from 5 to 28 ms−1. Finally the experimental data indicate that sensing performance of the single-chip type is better than that of the double-chip type with its higher sensitivity (0.7479 Ω/ms−1) due to the more rapid heat conduction from the heating resistor to the sensing resistor.
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机译：本文的目的是提出基于MEMS的流量传感器的两种类型的气流速度测量模块（双芯片和单芯片），该模块由氧化铝基板上的加热电阻和感测电阻组成。在这项研究中，采用MEMS技术在基板上沉积铂膜以形成电阻，该电阻被视为加热器和感应元件。当空气流过加热器和传感器时，热膜上的传感电阻器的温度降低，并且局部温度的变化决定了空气流速。实验结果表明，阻力随气流速度从5 ms变为28 ms -1 呈线性变化。最后的实验数据表明，由于更快的热传导，单芯片类型的感测性能优于双芯片类型，其灵敏度更高（0.7479Ω/ ms -1 ）从加热电阻到感测电阻。
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