On the initial temporal current characteristics of thin oxide devices depending on constant voltage pulse sequences

摘要

The temporal characteristics of the Fowler-Nordheim tunneling (FNT) current of thin oxide capacitors have been analyzed at different voltages. In addition to low and high field stress measurements, we also have included pre-tunneling voltages to compare several constant voltage stress (CVS) tests. We will show for the first time, that there is a steady transition in the variation of the current characteristic going from pre-tunneling voltages to high voltage stressing. This current characteristic and be explained by the superposition of two current components. We will explain our measurements by a qualitative model with the aid of an energy band diagram.