This article describes fabrication and properties of buried microheaters made inside low temperature co-fired ceramics (LTCC) structures. Laser cutting is used for meander pattern generation in dried Pt, PtAu or PdAg conductive pads. The electrical characterization of microheaters is based on measurement and analysis of R(T) dependence in the range from 20degC to 850degC, measurement and analysis of thermal dynamic properties, long-term high-temperature passive or active aging and behavior of the heater in a pulse operation mode. The presented results are very promising for application of LTCC microheaters in various microsystem devices.
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