Electro-thermal coupling is only one aspect of numerous interactions between physical domains in microsystems. Different physical effects govern the functionality of microsystems and the system-level modelling using standard electro-thermal tools is not easy. In order to predict potential failures in microsystem designs and reduce the costs of prototyping, it is important to involve the simulation of electro--thermal effects at the system level, early in the design process. Also, it is necessary to conduct a final verification of the complete system with all governing subsystems. This paper considers different issues of electro-thermal modelling for microsystems and proposes analogue simulators with hardware description languages as a tool for the system-level modelling. With increasing system complexity, the mixcd abstraction modelling is the only way to achieve an optimal blend of the accuracy and the speed.
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