Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope

摘要

Current contrast measurement via magnetic force microscopy (MFM) and voltage contrasts measurements via electric force microscopy (EFM) are contactless, chip internal test techniques for function and failure analysis of integrated circuits (IC). Up to now, only separated measurements of either currents or voltages are shown. This leads to high measurement times if both is needed on the same IC. Due to that instance a measurement technique is necessary which provides simultaneous measuring of both the magnetic as well as the electric force. In this paper a simultaneous IC-internal voltage and current measurement via a multi lever Scanning Force Microscope is presented for the first time.