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首页> 外文期刊>Microelectronics & Reliability >Electrical field mapping in InGaP HEMTs and GaAs terahertz emitters using backside infrared OBIC technique.
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Electrical field mapping in InGaP HEMTs and GaAs terahertz emitters using backside infrared OBIC technique.

机译:InGaP HEMT和GaAs太赫兹发射器中的电场映射使用背面红外OBIC技术。

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摘要

Electric potential and field are probed in selected III-V devices by backside infrared (1.3 μm wavelength) optical beam induced current (OBIC) technique under the DC and transient conditions. In an InGaP/InGaAs high electron mobility transistor (HEMT), the OBIC signals is sensitive to the distribution of electrical potential profile in the InGaP/InGaAs heterostructure and to the technological treatment (dry/wet etching). In a semi-insulating GaAs THz Emitter, the OBIC signal reflects well the lateral distribution and dynamics of the electric field. The physical origin Of the OBIC signal is discussed in details.
机译:在直流和瞬态条件下,通过背面红外(1.3μm波长)光束感应电流(OBIC)技术在选定的III-V器件中探测电势和电场。在InGaP / InGaAs高电子迁移率晶体管(HEMT)中,OBIC信号对InGaP / InGaAs异质结构中的电势分布和工艺处理(干法/湿法蚀刻)敏感。在半绝缘GaAs THz发射极中,OBIC信号很好地反映了电场的横向分布和动态。详细讨论OBIC信号的物理起源。

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