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Testing process capability for one-sided specification limit with application to the voltage level translator

机译:测试单边规格极限的过程能力并应用于电压电平转换器

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摘要

Process capability indices C_(PU) and C_(PL) have been widely used in the microelectronics manufacturing industry as capability measures for processes with one-sided specification limits. In this paper, the theory of statistical hypothesis testing is implemented for normal processes, using the uniformly minimum variance unbiased estimators of C_(PU) and C_(PL). Efficient SAS computer programs are provided to calculate the critical values and the p-values required for making decisions. Useful critical values for some commonly used capability requirements are tabulated. Based on the test a simple but practical step-by-step procedure is developed for in-plant applications. An example on the voltage level translator manufacturing process is given to illustrate how the proposed procedure may be applied to test whether the process meets the preset capability requirement.
机译:工艺能力指数C_(PU)和C_(PL)在微电子制造业中已广泛用作具有单方面规格限制的工艺的能力指标。在本文中,使用C_(PU)和C_(PL)的一致最小方差无偏估计量,对正常过程实施了统计假设检验的理论。提供了高效的SAS计算机程序来计算决策所需的临界值和p值。表中列出了一些常用功能需求的有用临界值。基于该测试,针对工厂内应用开发了一种简单但实用的分步过程。给出了电压电平转换器制造过程的一个示例,以说明所建议的过程如何应用于测试过程是否满足预设的能力要求。

著录项

  • 来源
    《Microelectronics & Reliability》 |2002年第12期|p.1975-1983|共9页
  • 作者

    P.C. Lin; W.L. Pearn;

  • 作者单位

    Center of General Education, National Chin-Yi Institute of Technology, Taipin, Taichung, Taiwan 411, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 一般性问题;
  • 关键词

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