A dual-beam Michelson interferometer for investigation of trigger dynamics in ESD protection devices under very fast TLP stress

摘要

A dual-beam Michelson interferometer for the investigation of the trigger dynamics in electrostatic discharge (ESD) protection devices under the transmission line pulses (TLP) and very-fast TLP stress is presented. The temperature and free carrier concentration induced transient phase shift is measured simultaneously at two different positions with 0.4 ns time resolution. The method is applied to study the transient delay in the BCD npn ESD protection devices under the vf-TLP stress. The experiments are used to validate the results of the device simulation.