VCO phase noise improvement through direct passive component modification in the FIB

摘要

It is shown in this study that it is possible to decrease under a controlled way the resistance of a passive component through the deposition of a Pt strap parallely connected to the involved device polysilicon resistor. Each modification step being followed by an electrical characterization, the evolution of device VCO phase noise versus equivalent resistor value could be drawn and the optimum value quantified.