On the Use of Neural Networks to Solve the Reverse Modelling Problem for the Quantification of Dopant Profiles Extracted by Scanning Probe Microscopy Techniques

摘要

In this paper, we present the use of artificial neural networks to extract the doping profile from the one-dimensional carrier concentration distribution (and viceversa). The valuesof the weights and of the biases are computed for the optimum network configuration. The performances and the noise immunity characteristicsof the proposed network are assessed and compared with those of the standard techniques.