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Optimizing the hot carrier reliability of N-LDMOS transistor arrays

机译:优化N-LDMOS晶体管阵列的热载流子可靠性

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摘要

Smart power management applications often require operation in the 20―30 V range. These applications combine a high performance BiCMOS process with a power lateral DMOS (LDMOS) driver. To obtain high drive current density and minimal on-resistance (R_(dson)), LDMOS devices are implemented in transistor arrays. Because of the high voltages and currents applied to these devices hot carrier degradation is a real reliability concern. This paper discusses several aspects of N-LDMOS hot carrier reliability including measurement techniques, degradation mechanism, and the effect of both one-dimensional (1-D) and two-dimensional (2-D) layout effects on the hot carrier degradation behavior of these devices. This paper focuses on device layout optimization rather than process changes since layout optimization has the advantage of improving performance without impacting other supported devices.
机译:智能电源管理应用通常需要在20至30 V的范围内工作。这些应用将高性能BiCMOS工艺与功率横向DMOS(LDMOS)驱动器结合在一起。为了获得高驱动电流密度和最小导通电阻(R_(dson)),LDMOS器件在晶体管阵列中实现。由于施加到这些设备的高电压和高电流,热载流子退化是真正的可靠性问题。本文讨论了N-LDMOS热载流子可靠性的几个方面,包括测量技术,退化机理以及一维(1-D)和二维(2-D)布局效应对N-LDMOS热载流子退化行为的影响。这些设备。由于布局优化具有在不影响其他支持设备的情况下提高性能的优势,因此本文着重于设备布局优化而不是过程更改。

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