Temperature compensation of piezoresistive micro-machined porous silico n pressure sensor by ANN

摘要

Porous silicon based micro-machined peizoresistive pressure sensors are fabricated and tested in the range of 0-1 bar and temperature range of 25-80℃. The dependence of pressure sensitivity on the variation of ambient temperature is investigated. An intelligent online temperature compensation scheme using ANN technique has been described. The proposed scheme leads to an error reduction of approximately 98% from temperature uncompensated value. A hardware implementation of the proposed scheme using micro-controller is also described.