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Black's law revisited—Nucleation and growth in electromigration failure

机译:重新审视布莱克定律—电迁移失败的成因和增长

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摘要

It can be seen through this exercise that the problem of predicting electromigration failure at use conditions accurately is not quite as straightforward as we had been led to believe over the past 40 years. Both the accelerations due to current and temperature, the two variables at our disposal, are not as they seem. Unless the current exponent is exactly one or two, Black's law as defined in Eq. (2) is incorrect. The activation energy as customarily obtained through the use of Eq. (8) is also incorrect, however, regardless of the measured current exponent. The work involved in accurately determining the proper extrapolation from accelerated tests is quite involved and probably beyond the means of most engineering assessments. The least one can get away with is to determine the current exponent fit to Black's law (Eq. (2)) and determine how much of the measured lifetime must be discounted under the conservative assumption that nucle-ation of damage will be provided by thermal stress voiding. The time to growth of the damage to failure can then be estimated with the use of pure growth kinetics and the activation energy for diffusion along the expected pathway.
机译:通过该练习可以看出,准确预测使用条件下的电迁移失败的问题并不像我们过去40年来所认为的那么简单。由电流和温度引起的加速度,这两个变量都没有我们所看到的那样。除非当前指数恰好是一或二,否则布莱克定律如方程式中所定义。 (2)不正确。通常通过使用等式获得活化能。但是,无论测量的电流指数如何,(8)也不正确。从加速测试中准确确定适当的外推法所涉及的工作非常复杂,可能超出了大多数工程评估的范围。至少可以逃脱的是确定当前符合布莱克定律的指数(等式(2)),并确定在保守的假设(热损伤将提供成核成核)的前提下,必须折减多少实测寿命。消除压力。然后可以使用纯的生长动力学和沿预期途径扩散的活化能来估算破坏破坏的增长时间。

著录项

  • 来源
    《Microelectronics & Reliability 》 |2007年第11期| p.1468-1472| 共5页
  • 作者

    J.R. Lloyd;

  • 作者单位

    IBM TJ Watson Research Center, Yorktown Heights, NY, United States;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 一般性问题 ;
  • 关键词

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