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Determination of temperature change inside IC packages during laser ablation of molding compound

机译:测定模塑料的激光烧蚀过程中IC封装内部的温度变化

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摘要

In addition to chemical jet etch method, decapsulation performances of electronic packages for failure analysis are virtually enhanced using lasers. Nevertheless circuits inside package could be subjected to a local thermal elevation during the package ablation process. In this paper, we introduce an innovative technique to measure the thermal behavior of an encapsulated system in situ and in real time during laser decapsulation. Measurements of the heat elevation during ablation process in the three regions of interest for failure analysis are discussed: over IC, bonding and lead-frame.
机译:除了化学喷射蚀刻方法外,使用激光还可以大大增强用于故障分析的电子封装的解封性能。然而,在封装烧蚀过程中,封装内部的电路可能会受到局部温度升高的影响。在本文中,我们介绍了一种创新技术,可以在激光拆封过程中实时地实时测量封装系统的热性能。讨论了在烧蚀过程中在三个感兴趣的区域中进行故障分析时对热量升高的测量:IC,键合和引线框架。

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