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Improved Upper Contacts Pmma On P3ht Ptfts Using Photolithographic Processes

机译:使用光刻工艺改进P3ht Ptfts上的上触点Pmma

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摘要

In this work we present a new polymeric thin film transistor (PTFT), fabrication process where standard photolithographic and dry etching techniques are used to place gate contact on the upper surface of the device, and to access in an easy and reliable way the buried bottom drain and source contacts from the upper surface of the device. This fabrication technique benefits of all the advantages that photolithographic processes report, as device isolation, patterning of small dimensions and possibility of device integration on both rigid and flexible substrates. We also show that, since PMMA is placed as the outermost polymeric layer, it serves both as dielectric and as protective layer, allowing devices to work in ambient conditions with significantly less degradation than other PTFTs structures previously reported. Electrical characterization of the devices showed that this technological approach provides mobility values an order of magnitude higher than those previously reported by us, using the same polymeric layers, but with buried drain and source contacts.
机译:在这项工作中,我们提出了一种新的聚合物薄膜晶体管(PTFT),其制造过程采用标准的光刻和干法蚀刻技术将栅极接触放置在器件的上表面,并以简单可靠的方式访问埋入的底部设备上表面的漏极和源极接触。这种制造技术受益于光刻工艺所报告的所有优点,例如器件隔离,小尺寸图案化以及在刚性和柔性衬底上集成器件的可能性。我们还表明,由于PMMA被放置为最外层的聚合物层,因此它既可以用作电介质又可以用作保护层,从而使器件可以在环境条件下工作,而降解程度比以前报道的其他PTFT结构要小得多。器件的电气特性表明,使用相同的聚合物层,但掩埋的漏极和源极接触,该技术方法提供的迁移率值比我们先前报道的迁移率值高一个数量级。

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