Microchannel fabrication process in LTCC ceramics

摘要

This paper describes a simple method of fluidic microchannel fabrication in low temperature co-fired ceramic (LTCC) substrates. This method is based on a new two-step lamination process with using sacrificial volume material (SVM) materials. The research is carried out for five different microchannel widths (100 μm, 200 μm, 500 μm, 1 mm and 5 mm). The test structures are manufactured using three different lamination pressures (50, 100 and 200 atmospheres) and two different SVM materials - carbon-black paste and cetyl alcohol. The resulting structures' mechanical properties are analyzed using a scanning electron microscope (SEM).