Capacitive RF MEMS analytical predictive reliability and lifetime characterization

摘要

The reliability of integrated systems is considered as a major obstacle in their development. The goal of this work is to estimate the lifetime of RF MEMS capacitive switch devices. This is performed by combining the functional and physical failure analysis models using the VHDL-AMS language. The physics of charging effects along with mechanical behavior of the membrane are introduced simultaneously to determine the time to failure.