Book review

摘要

Defects in Microelectronic Materials and Devices has 22 chapters and a total of 753 pages. Each chapter has a reference list averaging four pages. This fact demonstrates that the authors did a thorough job of acknowledging the contributions of other researchers in the field. The chapters present details on the types of semiconductor device defects and their influence on performance-related issues. Some of the issues discussed are well-known among researchers, while some are not completely understood but are currently being investigated.