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Prototyping of a reliable 3D flexible IC cube package by laser micromachining

机译:通过激光微加工对可靠的3D柔性IC立方体封装进行原型制作

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摘要

A newly designed three-dimensional (3D) flexible circuit as a package with five IC chips has been invented, and the prototype of the 3D package using laser micromachining has been successfully demonstrated. Fabrication processes of the 3D package consist of (1) preparation of printed wiring on the flexible substrate, (2) selective polyimide material removing on contact pads using UV laser (3) component placing and soldering, and (4) preparation of bending windows by laser micromachining. The production of the so-called bending window is a unique application of laser material processing. These windows can be used in flexible circuits to define the exact position of deformation. It is done by reducing the thickness of the flexible substrate in a well-defined, narrow line. The unique feature of this newly developed package is the 2D design for a 3D structure. According to this design, 55% area reduction can be obtained without any designing and overheating problems, which usually occurs. Furthermore, the new 3D package design can simplify processes such as I/O redistribution, chip cooling, and package formation. It is proven that the mechanical integrity of the prototype 3D stacked package meets the requirements of the 85 ℃/ 85% test.
机译:已经发明了作为具有五个IC芯片的封装的新设计的三维(3D)柔性电路,并且已经成功地证明了使用激光微加工的3D封装的原型。 3D封装的制造过程包括(1)在柔性基板上准备印刷线路,(2)使用UV激光在接触垫上去除选择性聚酰亚胺材料(3)元件放置和焊接,以及(4)通过弯曲来准备弯曲窗口激光微加工。所谓弯曲窗口的生产是激光材料加工的独特应用。这些窗口可用于柔性电路中,以定义变形的确切位置。这是通过减小柔性基板的厚度并使其清晰界定而实现的。这个新开发的软件包的独特功能是用于3D结构的2D设计。根据该设计,可以减少55%的面积,而不会出现通常会发生的任何设计和过热问题。而且,新的3D封装设计可以简化I / O重新分配,芯片冷却和封装形成等过程。事实证明,原型3D堆叠封装的机械完整性符合85℃/ 85%测试的要求。

著录项

  • 来源
    《Microelectronics reliability 》 |2009年第7期| 800-805| 共6页
  • 作者

    Richard Berenyi;

  • 作者单位

    Budapest University of Technology and Economics, Department of Electronics Technology, Goldman t. 3, 1111 Budapest, Hungary;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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