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Die-attachment solutions for SiC power devices

机译:SiC功率器件的芯片连接解决方​​案

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摘要

Silicon carbide has become a very attractive material for high temperature and high power electronics applications due to its physical properties, which are different than those of conventional Si semiconductors. However, the reliability of SiC devices is limited by assembly processes comprising die attachment and interconnections technology as well as the stability of ohmic contacts at high temperatures.rnThe investigations of die to substrate connection methods which can fulfill high temperature and high power requirements are the main focuses of the paper. This work focuses on die attach technologies: solder bonding by means of gold-germanium alloys, adhesive bonding with the use of organic and inorganic conductive compositions, as well as die bonding with the use of low temperature sintering with silver nanoparticles. The applied bonding technologies are described and obtained results are presented. Of the methods tested, the best solutions for high temperature application are two die attach technologies: silver glass die attach and die bonding with the use of low temperature sintered Ag nanopowders.
机译:由于碳化硅的物理特性不同于常规的硅半导体,因此碳化硅已成为高温和高功率电子应用中非常有吸引力的材料。然而,SiC器件的可靠性受到包括芯片附着和互连技术的装配过程以及高温下欧姆接触的稳定性的限制.rn研究能满足高温和高功率要求的芯片到衬底的连接方法是主要的本文的重点。这项工作的重点是芯片连接技术:通过金锗合金进行的焊料键合,使用有机和无机导电成分的粘合剂键合以及通过与银纳米颗粒的低温烧结进行的芯片键合。描述了所应用的粘接技术,并给出了获得的结果。在测试的方法中,用于高温应用的最佳解决方案是两种芯片附着技术:银玻璃芯片附着和使用低温烧结Ag纳米粉的芯片附着。

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  • 来源
    《Microelectronics reliability》 |2009年第6期|627-629|共3页
  • 作者

    R. Kisiel; Z. Szczepanski;

  • 作者单位

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00 662 Warszawa, Poland;

    Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00 662 Warszawa, Poland;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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