Analytical analysis of nanoscale multiple gate MOSFETs including effects of hot-carrier induced interface charges

摘要

As the channel length rapidly shrinks down to the nanoscale regime, the multiple gate MOSFETs structures have been considered as potential candidates for a CMOS device scaling due to its good short-chan nel-effects (SCEs) immunity. Therefore, in this work we investigate the scaling capability of Double Gate (DG) and Gate All Around (GAA) MOSFETs using an analytical analysis of the two dimensional Poisson equation in which the hot-carrier induced interface charge effects have been considered. Basing on this analysis, we have found that the degradation becomes more important when the channel length gets shorter, and the minimum surface potential position is affected by the hot-carrier induced localized interface charge density. Using this analysis, we have studied the scaling limits of DG and GAA MOSFETs and compared their performances including the hot-carrier effects. Our obtained results showed that the analytical analysis is in close agreement with the 2-D numerical simulation over a wide range of devices parameters. The proposed analytical approach may provide a theoretical basis and physical insights for multiple gate MOSFETs design including the hot-carrier degradation effects.