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Optimization of the Cu wire bonding process for IC assembly using Taguchi methods

机译:使用Taguchi方法优化IC组装的铜线键合工艺

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摘要

The yield of IC assembly manufacturing is dependent on wire bonding. Recently, the semiconductor industry demands smaller IC designs and higher performance requirements. As such, bonding wires must be stronger, finer, and more solid. The cost of gold is continuously appreciating, and this has become a key issue in IC assembly and design. Copper wire bonding is an alternative solution to this problem. It is expected to be superior over Au wires in terms of cost, quality, and fine-pitch bonding pad design. To obtain the best wire bonding quality, we employed Taguchi methods in optimizing the Cu wire bonding process. With Cu wire bonding technology, the production yield increased from 98.5% to 99.3% and brought approximately USD 0.7 million in savings.
机译:IC组件制造的成品率取决于引线键合。最近,半导体行业要求更小的IC设计和更高的性能要求。因此,键合线必须更牢固,更细且更牢固。金价一直在不断上涨,这已经成为IC组装和设计中的关键问题。铜线键合是此问题的替代解决方案。在成本,质量和细间距键合焊盘设计方面,预计它将优于金导线。为了获得最佳的引线键合质量,我们采用了Taguchi方法来优化Cu引线键合过程。借助铜线键合技术,生产率从98.5%提高到99.3%,并节省了约70万美元。

著录项

  • 来源
    《Microelectronics reliability》 |2011年第1期|p.53-59|共7页
  • 作者

    Chao-Ton Su; Cheng-Jung Yen;

  • 作者单位

    Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan;

    Department of Industrial Engineering and Management, National Chiao Tung University, Hsinchu, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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