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IMC growth reaction and its effects on solder joint thermal cycling reliability of 3D chip stacking packaging

机译:IMC生长反应及其对3D芯片堆叠封装焊点热循环可靠性的影响

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摘要

The study aims at assessing the growth reaction of the Ni_3Sn_4 intermetallic compound (IMC) during bonding process and its dependences on the thermal-cycling reliability of the Cu/Ni/SnAg micro-joints of an advanced 3D chip stacking package under accelerated thermal cycling (ATC) loading. The growth reaction of the IMC during bonding process is also predicted through experiment and classical diffusion theory, and the relation between the IMC thickness and bonding process temperature and time is derived according to the predicted activation energy of the chemical reaction between Sn and Ni by experiment. Moreover, the micro-joint reliability prediction is made using finite element (FE) analysis incorporated with an empirical Coffin-Manson fatigue life prediction model and also ATC experimental test. To facilitate the FE modeling, the temperature-dependent thermoelastic properties of both single crystal and polycrystalline Ni_3Sn_4 IMC are characterized through molecular dynamics simulation and the Voigt-Reuss bound and Voigt-Reuss-Hill approximation.Results show that monoclinic single crystal Ni_3Sn_4 reveals a high elastic anisotropy or direction dependence of elasticity. The diffusion reaction of Sn and Ni exhibits that a longer bonding process time and a higher bonding temperature could not only increase the IMC thickness but also vary its surface morphology. In addition, the thermal-mechanical performance of the micro-joints is strongly affected by the geometry and material of IMC layer, where IMC with a thicker thickness, a less Young's modulus, a smaller CTE and even a more rounded surface morphology can better the reliability.
机译:这项研究旨在评估Ni_3Sn_4金属间化合物(IMC)在键合过程中的生长反应及其对先进3D芯片堆叠封装在加速热循环下的Cu / Ni / SnAg微接头热循环可靠性的依赖性( ATC)加载。还通过实验和经典扩散理论对键合过程中IMC的生长反应进行了预测,并根据实验预测的Sn和Ni之间化学反应的活化能,得出了IMC厚度与键合过程温度和时间的关系。 。此外,使用有限元(FE)分析,经验Coffin-Manson疲劳寿命预测模型以及ATC实验测试,来进行微接头可靠性预测。为了促进有限元建模,通过分子动力学模拟和Voigt-Reuss界和Voigt-Reuss-Hill逼近来表征单晶和多晶Ni_3Sn_4 IMC的随温度变化的热弹性特性。弹性各向异性或弹性的方向依赖性。 Sn和Ni的扩散反应表明,更长的键合过程时间和更高的键合温度不仅会增加IMC的厚度,而且会改变其表面形态。此外,微接头的热机械性能受IMC层的几何形状和材料的强烈影响,其中厚度更厚,杨氏模量较小,CTE较小,甚至表面形态更圆整的IMC可以更好地解决这一问题。可靠性。

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  • 来源
    《Microelectronics & Reliability》 |2013年第1期|30-40|共11页
  • 作者单位

    Dept. of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan;

    Dept. of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan;

    Dept. of Aerospace and Systems Engineering, Feng Chia University, Taichung 40724, Taiwan,National Center for High-Performance Computing, Hsinchu 30076, Taiwan;

    Dept. of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan;

    Electronics and Optoelectronics Research Laboratories, ITRI, Hsinchu 31040, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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