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Influence of different carbon doping on the performance and reliability of InAlN/GaN HEMTs

机译:不同碳掺杂对InAlN / GaN HEMT性能和可靠性的影响

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摘要

This paper studies the impact of C-doped GaN buffers on the dynamic performance and reliability of InAlN/GaN high electron mobility transistors. The analysis carried out on two different families of devices with different doping levels shows that carbon induces negligible differences in DC characteristics, which can be mainly ascribed to process variability. However, carbon doping is found to have a strong impact on the trapping characteristics: pulsed evaluation shows a significant current collapse, as well as dynamical shift in threshold voltage and transconductance drop. Drain current transient investigation reveals two main traps with apparent activation energy of 0.89 eV (T_2) and 1.05 eV (T_1), whose amplitudes are found to be correlated with carbon doping. A more detailed analysis suggests that trap T_2 is located in the buffer layer. And that traps behave as a line defect. Finally, the reliability tests demonstrate that the use of high carbon doping does not significantly influence the robustness of the devices with respect to DC OFF-state stress.
机译:本文研究了掺C的GaN缓冲对InAlN / GaN高电子迁移率晶体管的动态性能和可靠性的影响。对两种不同的掺杂水平不同的器件系列进行的分析表明,碳引起的直流特性差异可忽略不计,这主要归因于工艺可变性。但是,发现碳掺杂对俘获特性有很大影响:脉冲评估显示出明显的电流崩溃,以及阈值电压和跨导压降的动态变化。漏电流瞬变研究显示了两个主阱,其表观活化能分别为0.89 eV(T_2)和1.05 eV(T_1),发现其幅度与碳掺杂有关。更详细的分析表明陷阱T_2位于缓冲层中。陷阱表现为线路缺陷。最后,可靠性测试表明,使用高碳掺杂不会明显影响器件在直流截止状态应力下的坚固性。

著录项

  • 来源
    《Microelectronics & Reliability》 |2014年第10期|2248-2252|共5页
  • 作者单位

    University of Padova, Department of Information Engineering via Gradenigo 6/b, 35131 Padova, Italy;

    University of Padova, Department of Information Engineering via Gradenigo 6/b, 35131 Padova, Italy;

    University of Padova, Department of Information Engineering via Gradenigo 6/b, 35131 Padova, Italy;

    University of Padova, Department of Information Engineering via Gradenigo 6/b, 35131 Padova, Italy,Infineon Technologies, Austria AG, Siemenstrasse 2, 9500 Villach, Austria;

    Ⅲ-Vlab., Route de Nozay, 91461 Marcoussis, France;

    Ⅲ-Vlab., Route de Nozay, 91461 Marcoussis, France;

    Ⅲ-Vlab., Route de Nozay, 91461 Marcoussis, France;

    Ⅲ-Vlab., Route de Nozay, 91461 Marcoussis, France;

    Ⅲ-Vlab., Route de Nozay, 91461 Marcoussis, France;

    Ⅲ-Vlab., Route de Nozay, 91461 Marcoussis, France;

    Infineon Technologies, Austria AG, Siemenstrasse 2, 9500 Villach, Austria;

    University of Padova, Department of Information Engineering via Gradenigo 6/b, 35131 Padova, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    InAlN/GaN; High electron mobility transistors; Carbon doping; Trapping; Drain current transients; Reliability;

    机译:InAlN / GaN;高电子迁移率晶体管;碳掺杂;诱捕;漏极电流瞬变;可靠性;

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