Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading

摘要

In this work the reliability of a Micro-Electro-Mechanical Systems (MEMS) microphone is studied through two accelerated life tests, mixed flowing gas (MFC) testing and shock impact testing. The objective is to identify the associated failure mechanisms and improve the reliability of MEMS devices. Failure analyses are carried out by using various tools, such as optical microscopy, scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS). Finite element analysis is also conducted to study the complex contact behaviors among the MEMS elements during shock impact testing. The predicted failure sites are in agreement with the experimental findings.