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Ultra-fine pitch palladium-coated copper wire bonding: Effect of bonding parameters

机译:镀钯的超细间距铜线:焊接参数的影响

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摘要

Copper (Cu) wire bonding has become a mainstream IC assembly solution due to its significant cost savings over gold wire. However, concerns on corrosion susceptibility and package reliability have driven the industry to develop alternative materials. In recent years, palladium-coated copper (PdCu) wire has become widely used as it is believed to improve reliability. In this paper, we experimented with 0.6 ml PdCu and bare Cu wires. Palladium distribution and grain structure of the PdCu Free Air Ball (FAB) were investigated. It was observed that Electronic Flame Off (EFO) current and the cover gas type have a significant effect on palladium distribution in the FAB. The FAB hardness was measured and correlated to palladium distribution and grain structure. First bond process responses were characterized. The impact of palladium on wire bondability and wire bond intermetallic using a high temperature storage test was studied.
机译:铜(Cu)线键合已比金线节省了大量成本,因此已成为主流的IC组装解决方案。然而,对腐蚀敏感性和包装可靠性的关注已促使行业开发替代材料。近年来,镀钯铜线(PdCu)被认为可以提高可靠性,因此已得到广泛使用。在本文中,我们用0.6 ml的PdCu和裸露的铜线进行了实验。研究了PdCu自由球(FAB)的钯分布和晶粒结构。据观察,电子火焰(EFO)电流和保护气体类型对FAB中的钯分布具有重大影响。测量了FAB硬度,并将其与钯分布和晶粒结构相关联。表征了第一键合过程的响应。利用高温储存试验研究了钯对金属线键合性和金属间线键合的影响。

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  • 来源
    《Microelectronics & Reliability》 |2014年第11期|2555-2563|共9页
  • 作者单位

    Kulicke & Soffa Pte. Ltd., 23A Serangoon North Avenue 5 #01-0 1, Singapore 554369, Singapore ,School of Materials Science and Engineering, Nanyang Technological University, Singapore 639798, Singapore;

    Kulicke & Soffa Pte. Ltd., 23A Serangoon North Avenue 5 #01-0 1, Singapore 554369, Singapore;

    Kulicke & Soffa Pte. Ltd., 23A Serangoon North Avenue 5 #01-0 1, Singapore 554369, Singapore;

    Kulicke & Soffa Industries Inc., 1005 Virginia Drive, Fort Washington, PA 19034, USA;

    School of Materials Science and Engineering, Nanyang Technological University, Singapore 639798, Singapore;

    School of Materials Science and Engineering, Nanyang Technological University, Singapore 639798, Singapore;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Palladium-coated copper wire; Palladium distribution; Grain structure; Electronic Flame Off current;

    机译:镀钯铜线;钯分布晶粒结构电子熄火电流;

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