Instability of oxide thin film transistor under electrical-mechanical hybrid stress for foldable display

摘要

Degradation mechanism of foldable thin film transistors (TFTs) is investigated experimentally by electrical, mechanical and electrical-mechanical hybrid stress experiments. Mechanical and electrical stress environment was set for foldable TFTs and the degradation effect according to the applied stress is investigated and analyzed. Degradation mechanism model that can explain the defect generation is suggested to explain the result of electrical mechanical hybrid stress experiment. (C) 2016 Elsevier Ltd. All rights reserved.