Laser Voltage Probing (LVP) - Its value and the race against scaling

摘要

After providing a brief introduction to Laser Voltage Probing (LVP), along with useful information and further reading suggestions, this paper provides a deep dive into current benefits and challenges of LVP applied to 16/14 nm FinFET technology and discusses the issues that arise from scaling of technology nodes according to the International Technology Roadmap for Semiconductors. (C) 2016 Published by Elsevier Ltd.