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Automatic characterisation method for statistical evaluation of tin whisker growth

机译:锡晶须生长统计评估的自动表征方法

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摘要

In this paper, an automatic method was developed to characterise whisker growth quantitatively in SEM images. The key step of the automatic methods in this case is the determination of the optimal threshold value for image segmentation, i.e. separation of the objects (whiskers) from the background (substrate). A thresholding method was developed for this purpose and was compared to manual and to general purpose automatic methods as references. As it was proven in previous studies the vacuum deposited tin layers on copper substrates can produce numerous tin whiskers in various shapes and lengths in a short time. This layer deposition technology was therefore chosen for the comparison of the thresholding methods. Images of the produced whiskers were captured by a FEI Inspect S50 Scanning Electron Microscope. By executing the automatic methods in the captured images, the area density of the whiskers, and the maximum and the mean length of the whiskers were measured. Based on the results of area density, the automatic methods were compared to manual counting and the Mean Absolute Percentage Error (MAPE) was determined. Finally, the reference automatic methods were compared to the self-developed method from the maximum and mean length of whiskers point of view. (C) 2017 Elsevier Ltd. All rights reserved.
机译:本文开发了一种自动方法来定量表征SEM图像中的晶须生长。在这种情况下,自动方法的关键步骤是确定用于图像分割的最佳阈值,即,将对象(晶须)与背景(基材)分离。为此,开发了一种阈值方法,并将其与手动和通用自动方法进行了比较。正如先前的研究所证明的那样,在铜基板上真空沉积的锡层可以在短时间内生产出各种形状和长度的锡须。因此,选择该层沉积技术来比较阈值方法。产生的晶须的图像由FEI Inspect S50扫描电子显微镜捕获。通过在捕获的图像中执行自动方法,可以测量晶须的面积密度以及晶须的最大长度和平均长度。根据面积密度的结果,将自动方法与手动计数进行比较,并确定平均绝对百分比误差(MAPE)。最后,从晶须的最大长度和平均长度的角度,将参考自动方法与自行开发的方法进行了比较。 (C)2017 Elsevier Ltd.保留所有权利。

著录项

  • 来源
    《Microelectronics & Reliability 》 |2017年第6期| 14-21| 共8页
  • 作者单位

    Budapest Univ Technol & Econ, Dept Elect Technol, Budapest, Hungary|Czech Tech Univ, Dept Electrotechnol, Fac Elect Engn, Tech 2, Prague 16627 6, Czech Republic;

    Budapest Univ Technol & Econ, Dept Elect Technol, Budapest, Hungary|Czech Tech Univ, Dept Electrotechnol, Fac Elect Engn, Tech 2, Prague 16627 6, Czech Republic;

    Budapest Univ Technol & Econ, Dept Elect Technol, Budapest, Hungary;

    Czech Tech Univ, Dept Electrotechnol, Fac Elect Engn, Tech 2, Prague 16627 6, Czech Republic;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Tin whisker; Automatic whisker characterisation; Thin film; Image thresholding; Mean intercept length;

    机译:锡晶须;自动晶须表征;薄膜;图像阈值;平均截距长度;

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