Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes

摘要

A new SCR-based device for ESD protection is presented through TCAD simulation and experimental results on a standalone configuration and for a power supply ESD clamp strategy. The new device can turn-off even if the voltage power supply is applied at its Anode. We use 3D TCAD simulation for understanding its turn-on and turn-off behavior. At the same time, the flexibility of the EOS test bench allows for standalone and power supply clamp characterizations at chip level at ambient and high temperature.